Custom Viton® Seals for Semiconductor Processing
How CTG Specializes in Semiconductor Viton® Seals
CTG excels in manufacturing high-performance Viton® fluoroelastomer seals specifically engineered for the demanding requirements of semiconductor processing equipment. Our specialized clean manufacturing processes ensure ultra-low particulate, outgassing, and extractable levels. We leverage extensive semiconductor industry experience to deliver Viton® seals that provide reliable service in critical wafer processing environments.
Semiconductor Viton® Seal Features
Our semiconductor Viton® seals feature:
- Ultra-low extractables and leachables
- Superior plasma resistance
- Excellent process gas compatibility
- Minimal particle generation
- Low outgassing characteristics
- Exceptional chemical resistance
- Thermal stability in vacuum environments
- Precision surface finishes
Semiconductor Processing Applications
CTG’s Viton® seals excel in semiconductor applications including:
- Plasma etch chambers
- Chemical vapor deposition (CVD) systems
- Physical vapor deposition (PVD) equipment
- Ion implantation systems
- Wafer handling robotics
- Gas delivery systems
- Vacuum chambers
- Wet process equipment
Industry Standards & Compliance
Our semiconductor Viton® seals meet:
- SEMI F47 specifications
- SEMI F57 standards
- ASTM E595 outgassing requirements
- ISO 14644 clean room standards
- RoHS and REACH compliance
- Customer-specific cleanliness requirements
- Particle certification standards
- Trace metal specifications
Semiconductor Viton® FAQ
How do you ensure ultra-clean manufacturing for semiconductor applications?
Our semiconductor Viton® seals are manufactured in dedicated clean room facilities with specialized
tool cleaning, particle-free packaging, and contamination control protocols to ensure the highest cleanliness levels.
What process gases are compatible with your semiconductor Viton® seals?
Our specialized semiconductor Viton® compounds offer excellent compatibility with most process gases including nitrogen, hydrogen, oxygen, argon, helium, and many reactive process gases.
How do your Viton® seals perform in plasma environments?
We offer specialized plasma-resistant Viton® formulations designed to minimize erosion, particle generation, and contamination in plasma processing environments.
What extractable testing is performed on your semiconductor Viton® materials?
Our semiconductor Viton® compounds undergo rigorous extractable testing using advanced analytical techniques including TOC, IC, ICP-MS, and FTIR to ensure they meet the strict purity requirements of semiconductor applications.
Can you provide certification for metal content in your Viton® seals?
Yes, we offer trace metal certification for our semiconductor Viton® compounds, documenting levels of critical metals that could potentially contaminate semiconductor processes.
Custom Solutions for Semiconductor Processing
CTG offers:
- Ultra-pure Viton® formulations
- Custom plasma resistance profiles
- Specialized surface treatments
- Enhanced chemical resistance
- Vacuum-optimized designs
- Rapid prototype development
- Material certification packages
- Particle and outgassing certification
Contact our technical team today at 800.299.1685 or email ctgsales@ctgasket.com for expert guidance on your semiconductor Viton® seal requirements.
24/7 Emergency Delivery Available
TECHNICAL LIBRARY
For available materials, sizing, geometry, gland considerations and more, view our technical library.
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24/7 Emergency Delivery Available
For urgent needs call 800.299.1685
