Custom FKM Seals for Semiconductor Processing
How CTG Specializes in Semiconductor FKM Seals
CTG excels in manufacturing high-performance FKM (Fluorocarbon) rubber seals specifically engineered for the demanding requirements of semiconductor processing equipment. Our specialized clean manufacturing processes ensure ultra-low particulate, outgassing, and extractable levels. We leverage extensive semiconductor industry experience to deliver seals that provide reliable service in critical wafer processing environments.
Semiconductor FKM Seal Features
Our semiconductor FKM seals feature:
- Ultra-low extractables and leachables
- Superior plasma resistance
- Excellent process gas compatibility
- Minimal particle generation
- Low outgassing characteristics
- Exceptional chemical resistance
- Thermal stability in vacuum environments
- Precision surface finishes
Semiconductor Processing Applications
CTG’s FKM seals excel in semiconductor applications including:
- Plasma etch chambers
- Chemical vapor deposition (CVD) systems
- Physical vapor deposition (PVD) equipment
- Ion implantation systems
- Wafer handling robotics
- Gas delivery systems
- Vacuum chambers
- Wet process equipment
Industry Standards & Compliance
Our semiconductor FKM seals meet:
- SEMI F47 specifications
- SEMI F57 standards
- ASTM E595 outgassing requirements
- ISO 14644 clean room standards
- RoHS and REACH compliance
- Customer-specific cleanliness requirements
- Particle certification standards
- Trace metal specifications
Semiconductor FKM FAQ
How do you ensure ultra-clean manufacturing for semiconductor applications?
Our semiconductor FKM seals are manufactured in dedicated clean room facilities with specialized tool cleaning, particle-free packaging, and contamination control protocols to ensure the highest cleanliness levels.
What process gases are compatible with your semiconductor FKM seals?
Our specialized semiconductor FKM compounds offer excellent compatibility with most process gases including nitrogen, hydrogen, oxygen, argon, helium, and many reactive process gases.
How do your FKM seals perform in plasma environments?
We offer specialized plasma-resistant FKM formulations designed to minimize erosion, particle generation, and contamination in plasma processing environments.
What extractable testing is performed on your semiconductor FKM materials?
Our semiconductor FKM compounds undergo rigorous extractable testing using advanced analytical techniques including TOC, IC, ICP-MS, and FTIR to ensure they meet the strict purity requirements of semiconductor applications.
Can you provide certification for metal content in your FKM seals?
Yes, we offer trace metal certification for our semiconductor FKM compounds, documenting levels of critical metals that could potentially contaminate semiconductor processes.
Custom Solutions for Semiconductor Processing
CTG offers:
- Ultra-pure FKM formulations
- Custom plasma resistance profiles
- Specialized surface treatments
- Enhanced chemical resistance
- Vacuum-optimized designs
- Rapid prototype development
- Material certification packages
- Particle and outgassing certification
Contact our technical team today at 800.299.1685 or email ctgsales@ctgasket.com for expert guidance on your semiconductor FKM seal requirements.
24/7 Emergency Delivery Available
TECHNICAL LIBRARY
For available materials, sizing, geometry, gland considerations and more, view our technical library.
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24/7 Emergency Delivery Available
For urgent needs call 800.299.1685
